UV enhanced substrate conformal imprint lithography (UV-SCIL) technique for photonic crystals patterning in LED manufacturing

Published 2009 View Full Article

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Title
UV enhanced substrate conformal imprint lithography (UV-SCIL) technique for photonic crystals patterning in LED manufacturing
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 87, Issue 5-8, Pages 963-967
Publisher
Elsevier BV
Online
2009-11-30
DOI
10.1016/j.mee.2009.11.134

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