3D visualization of mold filling stages in thermal nanoimprint by white light interferometry and atomic force microscopy

Published 2009 View Full Article

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Title
3D visualization of mold filling stages in thermal nanoimprint by white light interferometry and atomic force microscopy
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 20, Issue 35, Pages 355301
Publisher
IOP Publishing
Online
2009-08-12
DOI
10.1088/0957-4484/20/35/355301

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