Transparent hybrid polymer stamp copies with sub-50-nm resolution for thermal and UV-nanoimprint lithography

Published 2009 View Full Article

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Title
Transparent hybrid polymer stamp copies with sub-50-nm resolution for thermal and UV-nanoimprint lithography
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 6, Pages 2846
Publisher
American Vacuum Society
Online
2009-12-04
DOI
10.1116/1.3250207
References
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