A review of roll-to-roll nanoimprint lithography

Title
A review of roll-to-roll nanoimprint lithography
Authors
Keywords
Nanoimprint, Lithography, Nanofabrication, Nanopatterning, Roll-to-roll, Roll-to-plate, Plate-to-plate
Journal
Nanoscale Research Letters
Volume 9, Issue 1, Pages 320
Publisher
Springer Nature
Online
2014-06-25
DOI
10.1186/1556-276x-9-320

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