The fabrication of a flexible mold for high resolution soft ultraviolet nanoimprint lithography

Published 2008 View Full Article

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Title
The fabrication of a flexible mold for high resolution soft ultraviolet nanoimprint lithography
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 19, Issue 22, Pages 225304
Publisher
IOP Publishing
Online
2008-04-26
DOI
10.1088/0957-4484/19/22/225304

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