标题
Nanoimprint lithography: 2D or not 2D? A review
作者
关键词
PMMA, Injection Molding, Electron Beam Lithography, Residual Layer, Pattern Transfer
出版物
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 121, Issue 2, Pages 415-435
出版商
Springer Nature
发表日期
2015-04-02
DOI
10.1007/s00339-015-9106-3
参考文献
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