Experimental and numerical analyses on recovery of polymer deformation after demolding in the hot embossing process

Title
Experimental and numerical analyses on recovery of polymer deformation after demolding in the hot embossing process
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 6, Pages 2399-2403
Publisher
American Vacuum Society
Online
2008-12-16
DOI
10.1116/1.2987956

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