Microfabrication of sharp blazed gratings by a two-step height amplification process based on soft and deep X-ray lithography

Published 2013 View Full Article

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Title
Microfabrication of sharp blazed gratings by a two-step height amplification process based on soft and deep X-ray lithography
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 205, Issue -, Pages 111-118
Publisher
Elsevier BV
Online
2013-11-08
DOI
10.1016/j.sna.2013.09.036

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