Direct e-beam writing of dense and high aspect ratio nanostructures in thick layers of PMMA for electroplating

Published 2010 View Full Article

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Title
Direct e-beam writing of dense and high aspect ratio nanostructures in thick layers of PMMA for electroplating
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 21, Issue 29, Pages 295303
Publisher
IOP Publishing
Online
2010-07-06
DOI
10.1088/0957-4484/21/29/295303

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