High resolution 3D NanoImprint technology: Template fabrication, application in Fabry–Pérot-filter-array-based optical nanospectrometers

Published 2013 View Full Article

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Title
High resolution 3D NanoImprint technology: Template fabrication, application in Fabry–Pérot-filter-array-based optical nanospectrometers
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 110, Issue -, Pages 44-51
Publisher
Elsevier BV
Online
2013-05-05
DOI
10.1016/j.mee.2013.04.038

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