Press and release imprint: Control of the flexible mold deformation and the local variation of residual layer thickness in soft UV-NIL

Published 2011 View Full Article

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Title
Press and release imprint: Control of the flexible mold deformation and the local variation of residual layer thickness in soft UV-NIL
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 6, Pages 1033-1036
Publisher
Elsevier BV
Online
2011-02-02
DOI
10.1016/j.mee.2011.01.073

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