Analysis and characterization of demolding of hot embossed polymer microstructures

A thermo-mechanically-coupled large-deformation theory for amorphous polymers in a temperature range which spans their glass transition

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Replication performance of Si-N-DLC-coated Si micro-molds in micro-hot-embossing

(2010) B Saha et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Demolding temperature in thermal nanoimprint lithography

(2009) Sunggook Park et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Numerical analyses of peel demolding for UV embossing of high aspect ratio micro-patterning

(2009) L. P. Yeo et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

A thermo-mechanically coupled theory for large deformations of amorphous polymers. Part II: Applications

(2008) Nicoli M. Ames et al.   INTERNATIONAL JOURNAL OF PLASTICITY

Simulation study on stress and deformation of polymeric patterns during the demolding process in thermal imprint lithography

(2008) Zhichao Song et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Nanoimprint lithography: An old story in modern times? A review

(2008) Helmut Schift   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Measurement of demolding forces in full wafer thermal nanoimprint

(2008) Vera Trabadelo et al.   MICROELECTRONIC ENGINEERING

Modeling of large area hot embossing

(2008) M. Worgull et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS