Fine Pattern Fabrication by the Molded Mask Method (Nanoimprint Lithography) in the 1970s

Published 2009 View Full Article

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Title
Fine Pattern Fabrication by the Molded Mask Method (Nanoimprint Lithography) in the 1970s
Authors
Keywords
-
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 48, Issue 6, Pages 06FH01
Publisher
Japan Society of Applied Physics
Online
2009-06-22
DOI
10.1143/jjap.48.06fh01

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