Integration of rotated 3-D structures into pre-patterned PMMA substrate using step & stamp nanoimprint lithography

Published 2012 View Full Article

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Title
Integration of rotated 3-D structures into pre-patterned PMMA substrate using step & stamp nanoimprint lithography
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 98, Issue -, Pages 180-183
Publisher
Elsevier BV
Online
2012-07-20
DOI
10.1016/j.mee.2012.07.042

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