Nanoimprint lithography process chains for the fabrication of micro- and nanodevices

Published 2014 View Full Article

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Title
Nanoimprint lithography process chains for the fabrication of micro- and nanodevices
Authors
Keywords
-
Journal
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 13, Issue 3, Pages 031303
Publisher
SPIE-Intl Soc Optical Eng
Online
2014-07-19
DOI
10.1117/1.jmm.13.3.031303

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