Modeling Mechanism and Growth Reactions for New Nanofabrication Processes by Atomic Layer Deposition
出版年份 2015 全文链接
标题
Modeling Mechanism and Growth Reactions for New Nanofabrication Processes by Atomic Layer Deposition
作者
关键词
-
出版物
ADVANCED MATERIALS
Volume 28, Issue 27, Pages 5367-5380
出版商
Wiley
发表日期
2015-12-21
DOI
10.1002/adma.201504043
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