Atomic-scale simulation of ALD chemistry

标题
Atomic-scale simulation of ALD chemistry
作者
关键词
-
出版物
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 27, Issue 7, Pages 074008
出版商
IOP Publishing
发表日期
2012-06-23
DOI
10.1088/0268-1242/27/7/074008

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