A theoretical study on initial growth mechanism of ZrO2 film using cyclopentadienyl-type precursor

标题
A theoretical study on initial growth mechanism of ZrO2 film using cyclopentadienyl-type precursor
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 519, Issue 11, Pages 3716-3721
出版商
Elsevier BV
发表日期
2011-01-29
DOI
10.1016/j.tsf.2011.01.278

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