Density Functional Theory Predictions of the Composition of Atomic Layer Deposition-Grown Ternary Oxides

标题
Density Functional Theory Predictions of the Composition of Atomic Layer Deposition-Grown Ternary Oxides
作者
关键词
-
出版物
ACS Applied Materials & Interfaces
Volume 5, Issue 9, Pages 3704-3715
出版商
American Chemical Society (ACS)
发表日期
2013-04-02
DOI
10.1021/am400310p

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