Metal ALD and pulsed CVD: Fundamental reactions and links with solution chemistry

标题
Metal ALD and pulsed CVD: Fundamental reactions and links with solution chemistry
作者
关键词
-
出版物
COORDINATION CHEMISTRY REVIEWS
Volume 257, Issue 23-24, Pages 3282-3296
出版商
Elsevier BV
发表日期
2013-07-20
DOI
10.1016/j.ccr.2013.07.010

向作者/读者发起求助以获取更多资源

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started