Initial reaction of silicon precursors with a varying number of dimethylamino ligands on a hydroxyl-terminated silicon (001) surface

出版年份 2013 全文链接

标题

作者

关键词

出版物

Volume 280, Issue -, Pages 207-211

出版商

Elsevier BV

发表日期

2013-05-02

DOI

10.1016/j.apsusc.2013.04.129

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