First principles simulation of reaction steps in the atomic layer deposition of titania: dependence of growth on Lewis acidity of titanocene precursor
出版年份 2012 全文链接
标题
First principles simulation of reaction steps in the atomic layer deposition of titania: dependence of growth on Lewis acidity of titanocene precursor
作者
关键词
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出版物
PHYSICAL CHEMISTRY CHEMICAL PHYSICS
Volume 14, Issue 22, Pages 7954
出版商
Royal Society of Chemistry (RSC)
发表日期
2012-04-04
DOI
10.1039/c2cp40491e
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