Initial growth mechanism of atomic layer deposition of ZnO on the hydroxylated Si(100)-2×1: A density functional theory study

标题
Initial growth mechanism of atomic layer deposition of ZnO on the hydroxylated Si(100)-2×1: A density functional theory study
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 255, Issue 11, Pages 5742-5745
出版商
Elsevier BV
发表日期
2009-01-07
DOI
10.1016/j.apsusc.2008.12.077

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