Detection of a Formate Surface Intermediate in the Atomic Layer Deposition of High-κ Dielectrics Using Ozone

标题
Detection of a Formate Surface Intermediate in the Atomic Layer Deposition of High-κ Dielectrics Using Ozone
作者
关键词
-
出版物
CHEMISTRY OF MATERIALS
Volume 20, Issue 10, Pages 3248-3250
出版商
American Chemical Society (ACS)
发表日期
2008-05-04
DOI
10.1021/cm703667h

向作者/读者发起求助以获取更多资源

Publish scientific posters with Peeref

Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.

Learn More

Create your own webinar

Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.

Create Now