The measurement and impact of negative oxygen ions during reactive sputter deposition
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Title
The measurement and impact of negative oxygen ions during reactive sputter deposition
Authors
Keywords
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Journal
CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES
Volume -, Issue -, Pages 1-36
Publisher
Informa UK Limited
Online
2023-09-22
DOI
10.1080/10408436.2023.2258159
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