A kinetic model for stress generation in thin films grown from energetic vapor fluxes

Compressive intrinsic stress originates in the grain boundaries of dense refractory polycrystalline thin films

(2016) D. Magnfält et al.   JOURNAL OF APPLIED PHYSICS

Grain growth and complex stress evolution during Volmer–Weber growth of polycrystalline thin films

(2014) Hang Z. Yu et al.   ACTA MATERIALIA

Growth of patterned island arrays to identify origins of thin film stress

(2014) E. Chason et al.   JOURNAL OF APPLIED PHYSICS

Atom insertion into grain boundaries and stress generation in physically vapor deposited films

(2013) D. Magnfält et al.   APPLIED PHYSICS LETTERS

Understanding Residual Stress in Electrodeposited Cu Thin Films

(2013) Eric Chason et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Real-time stress evolution during early growth stages of sputter-deposited metal films: Influence of adatom mobility

(2013) G. Abadias et al.   VACUUM

Kinetic model for dependence of thin film stress on growth rate, temperature, and microstructure

(2012) E. Chason et al.   JOURNAL OF APPLIED PHYSICS

Intrinsic stress in ZrN thin films: Evaluation of grain boundary contribution from in situ wafer curvature and ex situ x-ray diffraction techniques

(2012) L. E. Koutsokeras et al.   JOURNAL OF APPLIED PHYSICS

A kinetic analysis of residual stress evolution in polycrystalline thin films

(2012) Eric Chason   THIN SOLID FILMS

Stress, phase stability and oxidation resistance of ternary Ti–Me–N (Me=Zr, Ta) hard coatings

(2012) G. Abadias et al.   THIN SOLID FILMS

Radiation-induced damage and evolution of defects in Mo

(2011) Sergey V. Starikov et al.   PHYSICAL REVIEW B

Influence of Phase Transformation on Stress Evolution during Growth of Metal Thin Films on Silicon

(2010) A. Fillon et al.   PHYSICAL REVIEW LETTERS

Stress and microstructure evolution during growth of magnetron-sputtered low-mobility metal films: Influence of the nucleation conditions

(2010) A. Fillon et al.   THIN SOLID FILMS

Understanding the relation between stress and surface morphology in sputtered films: Atomistic simulations and experiments

(2009) Luis A. Zepeda-Ruiz et al.   APPLIED PHYSICS LETTERS

Compressive Stress Generation in Sn Thin Films and the Role of Grain Boundary Diffusion

(2009) Jae Wook Shin et al.   PHYSICAL REVIEW LETTERS

Direct Evidence for Effects of Grain Structure on Reversible Compressive Deposition Stresses in Polycrystalline Gold Films

(2009) J. Leib et al.   PHYSICAL REVIEW LETTERS

Stress in Evaporated and Sputtered Thin Films – A Comparison

(2009) R. Koch   SURFACE & COATINGS TECHNOLOGY

High power pulsed magnetron sputtering: A review on scientific and engineering state of the art

(2009) K. Sarakinos et al.   SURFACE & COATINGS TECHNOLOGY

In situ stress evolution during magnetron sputtering of transition metal nitride thin films

(2008) G. Abadias et al.   APPLIED PHYSICS LETTERS

The metal flux from a rotating cylindrical magnetron: a Monte Carlo simulation

(2008) K Van Aeken et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS