Sputtering yields of compounds using argon ions

Published 2010 View Full Article

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Title
Sputtering yields of compounds using argon ions
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 43, Issue 25, Pages 253001
Publisher
IOP Publishing
Online
2010-06-11
DOI
10.1088/0022-3727/43/25/253001

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