Particle-in-cell/Monte Carlo collisions treatment of an Ar/O2magnetron discharge used for the reactive sputter deposition of TiOxfilms

Published 2009 View Full Article

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Title
Particle-in-cell/Monte Carlo collisions treatment of an Ar/O2magnetron discharge used for the reactive sputter deposition of TiOxfilms
Authors
Keywords
-
Journal
NEW JOURNAL OF PHYSICS
Volume 11, Issue 10, Pages 103010
Publisher
IOP Publishing
Online
2009-10-06
DOI
10.1088/1367-2630/11/10/103010

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