A structure zone diagram including plasma-based deposition and ion etching

Published 2009 View Full Article

Authors

Keywords

Journal

THIN SOLID FILMS

Volume 518, Issue 15, Pages 4087-4090

Publisher

Elsevier BV

Online

2009-10-30

DOI

10.1016/j.tsf.2009.10.145

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THIN SOLID FILMS

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