Reactive sputter deposition of TiN layers: modelling the growth by characterization of particle fluxes towards the substrate

Title
Reactive sputter deposition of TiN layers: modelling the growth by characterization of particle fluxes towards the substrate
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 42, Issue 5, Pages 053002
Publisher
IOP Publishing
Online
2009-02-19
DOI
10.1088/0022-3727/42/5/053002

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