Room temperature deposition of high figure of merit Al-doped zinc oxide by pulsed-direct current magnetron sputtering: Influence of energetic negative ion bombardment on film's optoelectronic properties

Published 2014 View Full Article

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Title
Room temperature deposition of high figure of merit Al-doped zinc oxide by pulsed-direct current magnetron sputtering: Influence of energetic negative ion bombardment on film's optoelectronic properties
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 569, Issue -, Pages 44-51
Publisher
Elsevier BV
Online
2014-08-29
DOI
10.1016/j.tsf.2014.08.023

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