Ga-doped ZnO films by magnetron sputtering at ultralow discharge voltages: Effects of defect annihilation

Published 2017 View Full Article

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Title
Ga-doped ZnO films by magnetron sputtering at ultralow discharge voltages: Effects of defect annihilation
Authors
Keywords
Ga-doped ZnO, Magnetron sputter, Ultralow discharge voltage, Defect annihilation
Journal
THIN SOLID FILMS
Volume 644, Issue -, Pages 16-22
Publisher
Elsevier BV
Online
2017-09-12
DOI
10.1016/j.tsf.2017.05.055

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