Sputter yield measurements to evaluate the target state during reactive magnetron sputtering

Published 2020 View Full Article

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Title
Sputter yield measurements to evaluate the target state during reactive magnetron sputtering
Authors
Keywords
Oxide sputter yield, Discharge voltage, Reactive sputtering
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 399, Issue -, Pages 126097
Publisher
Elsevier BV
Online
2020-06-27
DOI
10.1016/j.surfcoat.2020.126097

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