The behaviour of negative oxygen ions in the afterglow of a reactive HiPIMS discharge

Published 2014 View Full Article

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Title
The behaviour of negative oxygen ions in the afterglow of a reactive HiPIMS discharge
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 47, Issue 26, Pages 265202
Publisher
IOP Publishing
Online
2014-06-05
DOI
10.1088/0022-3727/47/26/265202

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