A study of the plasma electronegativity in an argon–oxygen pulsed-dc sputter magnetron

Published 2010 View Full Article

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Title
A study of the plasma electronegativity in an argon–oxygen pulsed-dc sputter magnetron
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 43, Issue 50, Pages 505205
Publisher
IOP Publishing
Online
2010-12-03
DOI
10.1088/0022-3727/43/50/505205

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