Journal
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY
Volume 64, Issue 11-12, Pages 1266-1279Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.sab.2009.10.003
Keywords
Glow discharge; Computer simulation; Numerical modeling; Argon/oxygen gas mixture; Oxygen addition
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Funding
- European Marie Curie Research Training Network GLADNET [MRTN-CT-2006 035459]
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A hybrid model is developed for describing the effects of oxygen addition to argon glow discharges. The species taken into account in the model include At atoms in the ground state and the metastable level, O-2 gas molecules in the ground state and two metastable levels. O atoms in the ground state and one metastable level, O-3 molecules, Ar+, O+, O-2(+) and O- ions, as well as the electrons. The hybrid model consists of a Monte Carlo model for electrons and fluid models for the other plasma species. In total, 87 different reactions between the various plasma species are taken into account. Calculation results include the species densities and the importance of their production and loss processes, as well as the dissociation degree of oxygen. The effect of different O-2 additions on these calculation results, as well as on the sputtering rates. is discussed. (C) 2009 Published by Elsevier B.V.
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