Determination of energy modulations of negative oxygen ions during pulsed magnetron sputtering of magnesium oxide

Fine Structure of O-Kinetic Energy Distribution in RF Plasma and Its Formation Mechanism

(2009) Hirotaka Toyoda et al.   Applied Physics Express

Physics and phenomena in pulsed magnetrons: an overview

(2009) J W Bradley et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Ion Energy Distributions in Magnetron Sputtering of Zinc Aluminium Oxide

(2009) Thomas Welzel et al.   Plasma Processes and Polymers

Ion energy distributions in AZO magnetron sputtering from planar and rotatable magnetrons

(2009) F. Richter et al.   SURFACE & COATINGS TECHNOLOGY

A structure zone diagram including plasma-based deposition and ion etching

(2009) André Anders   THIN SOLID FILMS

Determination of the effective electron emission yields of compound materials

(2008) D Depla et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Spatial and temporal development of the plasma potential in differently configured pulsed magnetron discharges

(2008) Th Welzel et al.   NEW JOURNAL OF PHYSICS