Magnetron sputter deposition: Linking discharge voltage with target properties

Title
Magnetron sputter deposition: Linking discharge voltage with target properties
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 9, Pages 2825-2839
Publisher
Elsevier BV
Online
2008-11-22
DOI
10.1016/j.tsf.2008.11.108

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