Article
Materials Science, Coatings & Films
Tomasz Wojcik, Vincent Ott, Sedat Oezbilen, Harald Leiste, Sven Ulrich, Paul Heinz Mayrhofer, Helmut Riedl, Michael Stueber
Summary: Transition metal diboride-based thin films have attracted strong interest in both fundamental and applied research. This study investigated the constitution and microstructure of multilayer thin films composed of TiBx and NiAl, and found that the nature of the interfaces has an impact on dislocation density and the ability to form dislocations in these multilayer structures.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
(2022)
Article
Engineering, Electrical & Electronic
Haifa A. A. Alyousef, A. M. Hassan, Hesham M. H. Zakaly
Summary: This study investigates the structural and optical characteristics of aluminum nitride (AlN) thin films deposited using reactive magnetron sputtering. The results show that the AlN thin films have a wurtzite structure with a preferred orientation, and the average particle size is in the range of 80-83 nm. The AlN thin films have potential applications due to their transparent properties and increased bandgap with increasing work pressure.
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
(2023)
Article
Crystallography
He Gao, Shijian Wang, Da Xu, Xueshen Wang, Qing Zhong, Yuan Zhong, Jinjin Li, Wenhui Cao
Summary: In this study, a comprehensive analysis was conducted on the properties of DC magnetron sputtered Nb films fabricated with constant power at the National Institute of Metrology (China). The results showed that the stress and other parameters of the films can maintain a relatively stable state under constant power and Ar pressure.
Article
Crystallography
Ulises Barajas-Valdes, Oscar Marcelo Suarez
Summary: This study utilized radio frequency magnetron sputtering to prepare aluminum and aluminum-boron thin films for microelectronic mechanical systems applications. The research found that aluminum-boron films had lower roughness and better crystallinity compared to pure aluminum films, making them a promising alternative for metal films manufacturing. The study evaluated the impact of sputtering power and substrate type on film deposition, revealing significant differences in morphology and structure between the two types of films.
Article
Materials Science, Multidisciplinary
Petr Novak, Lucie Nedvedova, Tomas Kozak, Petra Sotova, Olga Blahova, Zdenek Jansa, Rostislav Medlin, Marie Frank Netrvalova, Jan Minar
Summary: Undoped and doped zinc oxide films were prepared under oxygen-rich and oxygen-poor conditions, and their properties were investigated experimentally. The film properties were found to depend on the oxygen conditions, with oxygen-rich conditions leading to stoichiometric ZnO films and oxygen-poor conditions resulting in strongly oxygen-deficient films.
Article
Chemistry, Multidisciplinary
Zhenxue Zhang, Mikdat Gurtaran, Xiaoying Li, Hio-Ieng Un, Yi Qin, Hanshan Dong
Summary: In this study, N-type and P-type BiTe-based thin films were deposited on silicon, glass, and Kapton HN polyimide foil using magnetron sputtering technique. The morphology, microstructure, and phase constituents of the thin films were characterized by SEM/EDX, XRD, and TEM. The electrical conductivity, thermal conductivity, and Seebeck coefficient were measured by an advanced in-plane test system. The power output (open-circuit voltage and electric current) of the thin films was measured at different temperature gradients using a custom-built apparatus. The impact of deposition parameters and the dimensions of the thin films on the power output were investigated to optimize the thin-film flexible TE device for thermal energy harvesting.
Article
Materials Science, Coatings & Films
Hao Du, Rui Shu, Robert Boyd, Arnaud le Febvrier, Ulf Helmersson, Per Eklund, Daniel Lundin
Summary: Growth temperature and ion irradiation energy have significant effects on the crystal structure and residual stress of TiNb-CrAlHfN films. Increasing the growth temperature leads to a change in the film texture and a decrease in compressive stress. On the other hand, varying the energy of Hf+ ions results in a texture transition, with high-surface-energy planes changing to low-surface-energy planes and vice versa. The compressive stress in the films increases with increasing ion energy. These findings demonstrate that the properties of FCC-structured high-entropy nitrides can be tailored by adjusting the growth temperature and ion irradiation energy.
SURFACE & COATINGS TECHNOLOGY
(2023)
Article
Chemistry, Multidisciplinary
Rajib Sahu, Dimitri Bogdanovski, Jan-Ole Achenbach, Siyuan Zhang, Marcus Hans, Daniel Primetzhofer, Jochen M. Schneider, Christina Scheu
Summary: The direct formation of MoB MBene domains in MoAlB thin film by Al deintercalation from MoAlB in the vicinity of AlOx regions is reported. Based on these results, a straightforward processing pathway for the direct formation of MoB MBene-AlOx heterostructures without employing chemical etching is proposed.
Article
Materials Science, Multidisciplinary
Y. Kudryavtsev, N. Uvarov, V. Y. Tarenkov
Summary: The impact of structural disorder on the physical properties of nickel films was studied, showing that amorphous nickel films have distinct characteristics compared to crystalline ones, and can transform into crystalline films with similar properties through annealing.
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS
(2021)
Article
Materials Science, Multidisciplinary
B. O. Mukhamedov, S. Fritze, M. Ottosson, B. Osinger, E. Lewin, B. Alling, U. Jansson, I. A. Abrikosov
Summary: A systematic study was conducted on the phase stability and mechanical properties of supersaturated W-C solid solutions, revealing that the tetragonal structure is more stable than the bcc supersaturated solid solution. The lattice parameters and Young's moduli follow the same trends as the experimental ones as a function of C concentration, suggesting that lattice-distorted supersaturated films can be used to improve transition metal films with a bcc structure.
MATERIALS & DESIGN
(2022)
Article
Materials Science, Ceramics
Sathish, Habibuddin Shaik, K. Naveen Kumar, R. Imran Jafri, Ashok G. Reddy, Sheik Abdul Sattar
Summary: This study prepared Aluminum doped Zinc Oxide (AZO) thin films with different concentrations of Al2O3, analyzing their optical and electrical properties. It was found that a 3% Al2O3 content led to a significant decrease in resistivity, while 7% resulted in a noticeable decrease in optical transmittance. The increase in Al2O3 content was observed to lead to higher carrier concentration and mobility, as well as a decreasing bandgap of the films.
CERAMICS INTERNATIONAL
(2021)
Article
Materials Science, Ceramics
Chen Wang, Wei-Hang Fan, Yu-Chao Zhang, Pin-Chun Kang, Wan-Yu Wu, Dong-Sing Wuu, Shui-Yang Lien, Wen-Zhang Zhu
Summary: This study investigated the properties of Sn-doped Ga2O3 films deposited on sapphire substrates through RF magnetron sputtering at different oxygen flow ratios. In situ optical emission spectroscopy was used to monitor the plasma radicals generated during the deposition process. The films showed amorphous structures with nanoparticles and a decreased deposition rate with increasing oxygen flow ratio. The conductive mechanism of the films was attributed to the ratio of substitutional Sn atoms and the SnO2 phase. Metal-semiconductor-metal solar-blind photodetectors were developed and analyzed to demonstrate the effect of oxygen flow ratio.
CERAMICS INTERNATIONAL
(2023)
Article
Materials Science, Multidisciplinary
A. A. Serdobintsev, V. V. Galushka, L. D. Volkovoynova, I. O. Kozhevnikov, E. S. Prikhozhdenko, D. I. Artyukhov, N. V. Gorshkov, A. M. Pavlov, A. V. Starodubov
Summary: This study reports on the effects of aluminum and silicon segregation in mu m-thick magnetron co-deposited Si-Al films. It was found that an increase in aluminum content leads to the segregation of a separate crystalline phase, accompanied by the emergence of the c-Si phase. Silicon crystallization process is controlled by the redistribution of components in the film, which can be attributed to aluminum-induced crystallization process. The redistribution of aluminum and silicon phases in the amorphous matrix can be utilized to customize the electrophysical properties of the resulting coatings for applications in mm-band RF devices.
Article
Optics
Zhou Lu, Xin Lv, Quan Xie
Summary: Thin transparent semiconductor films of GaMgZnO were prepared on quartz glass substrates using magnetron sputtering technique. The effects of sputtering pressure on the crystallization, micro-structure, electrical and optical features of the films were investigated. The results showed that sputtering pressure significantly influenced the structure and electro-optical characteristics of the films, with the sample prepared under a pressure of 3.6 Pa exhibiting the best quality and performance.
Article
Materials Science, Multidisciplinary
B. Gopal Naik, S. V. Jagadeesh Chandra, S. Uthanna
Summary: Zirconium niobium oxide thin films were deposited on unheated substrates using DC reactive magnetron sputtering, and their composition and properties were studied by XPS. Oxygen partial pressure and annealing temperature significantly influenced the morphology, crystallinity, and electrical properties of the films.
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
(2021)
