Spatial Variation of Negative Oxygen Ion Energy Distribution in RF Magnetron Plasma with Oxide Target

Published 2009 View Full Article

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Title
Spatial Variation of Negative Oxygen Ion Energy Distribution in RF Magnetron Plasma with Oxide Target
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 48, Issue 11, Pages 116004
Publisher
Japan Society of Applied Physics
Online
2009-11-20
DOI
10.1143/jjap.48.116004

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