A study of deposition of ITO films on organic layer using facing target sputtering in Ar and Kr gases

Title
A study of deposition of ITO films on organic layer using facing target sputtering in Ar and Kr gases
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 11, Pages 2926-2929
Publisher
Elsevier BV
Online
2009-10-25
DOI
10.1016/j.tsf.2009.08.059

Ask authors/readers for more resources

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started