Investigation of HfO2 Thin Films on Si by X-ray Photoelectron Spectroscopy, Rutherford Backscattering, Grazing Incidence X-ray Diffraction and Variable Angle Spectroscopic Ellipsometry

Interface chemistry and electronic structure of ALD-derived HfAlO/Ge gate stacks revealed by X-ray photoelectron spectroscopy

(2017) Gang He et al.   JOURNAL OF ALLOYS AND COMPOUNDS

Effect of oxygen vacancies and strain on the phonon spectrum of HfO2 thin films

(2017) Lingyuan Gao et al.   JOURNAL OF APPLIED PHYSICS

Bipolar Resistive Switching Characteristics of HfO2/TiO2/HfO2 Trilayer-Structure RRAM Devices on Pt and TiN-Coated Substrates Fabricated by Atomic Layer Deposition

(2017) Wei Zhang et al.   Nanoscale Research Letters

In Situ Analysis of Oxygen Vacancies and Band Alignment in HfO2/TiN Structure for CMOS Applications

(2017) Da-Peng Xu et al.   Nanoscale Research Letters

Bipolar Resistive Switching Characteristics of HfO2/TiO2/HfO2 Trilayer-Structure RRAM Devices on Pt and TiN-Coated Substrates Fabricated by Atomic Layer Deposition

(2017) Wei Zhang et al.   Nanoscale Research Letters

In Situ Analysis of Oxygen Vacancies and Band Alignment in HfO2/TiN Structure for CMOS Applications

(2017) Da-Peng Xu et al.   Nanoscale Research Letters

Derivation of dielectric function and inelastic mean free path from photoelectron energy-loss spectra of amorphous carbon surfaces

(2016) Denis David et al.   APPLIED SURFACE SCIENCE

A novel reduction–oxidation synthetic route for hafnia

(2016) Branko Matovic et al.   CERAMICS INTERNATIONAL

Charge transport and bipolar switching mechanism in a Cu/HfO2/Pt resistive switching cell

(2016) Tingting Tan et al.   Chinese Physics B

Impact of post deposition annealing in O2 ambient on structural properties of nanocrystalline hafnium oxide thin film

(2016) Shilpi Pandey et al.   JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS

Amazing diffusion depth of ultra-thin hafnium oxide film grown on n-type silicon by lower temperature atomic layer deposition

(2016) Qihai Lu et al.   MATERIALS LETTERS

SHI induced effects on the electrical and optical properties of HfO2 thin films deposited by RF sputtering

(2016) N. Manikanthababu et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Ferroelectricity in undoped-HfO2 thin films induced by deposition temperature control during atomic layer deposition

(2016) K. D. Kim et al.   Journal of Materials Chemistry C

Ferroelectricity and Antiferroelectricity of Doped Thin HfO2-Based Films

(2015) Min Hyuk Park et al.   ADVANCED MATERIALS

Optical characteristics of H2O-based and O3-based HfO2 films deposited by ALD using spectroscopy ellipsometry

(2015) Xiaojiao Fan et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Ferroelectricity in undoped hafnium oxide

(2015) Patrick Polakowski et al.   APPLIED PHYSICS LETTERS

Studies on RF magnetron sputtered HfO2 thin films for microelectronic applications

(2015) P. Kondaiah et al.   Electronic Materials Letters

Resistive switching behavior of HfO2film with different Ti doping concentrations

(2015) Tingting Guo et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Optical characterization of hafnium oxide thin films for heat mirrors

(2015) M. Ramzan et al.   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Towards forming-free resistive switching in oxygen engineered HfO2−x

(2014) S. U. Sharath et al.   APPLIED PHYSICS LETTERS

A Forming-Free Bipolar Resistive Switching in HfOx-Based Memory with a Thin Ti Cap

(2014) Hua Pang et al.   CHINESE PHYSICS LETTERS

In-situ spectroscopic ellipsometry and structural study of HfO2 thin films deposited by radio frequency magnetron sputtering

(2014) Ayten Cantas et al.   JOURNAL OF APPLIED PHYSICS

Structure and optical properties of nanocrystalline hafnium oxide thin films

(2014) M. Vargas et al.   OPTICAL MATERIALS

Prediction of Semimetallic TetragonalHf2O3andZr2O3from First Principles

(2013) Kan-Hao Xue et al.   PHYSICAL REVIEW LETTERS

Effect of Ti doping concentration on resistive switching behaviors of Yb2O3 memory cell

(2012) Somnath Mondal et al.   APPLIED PHYSICS LETTERS

Facile synthesis of hafnium oxide nanoparticles via precipitation method

(2012) Ananthakumar Ramadoss et al.   MATERIALS LETTERS

Comparison of methods to determine bandgaps of ultrathin HfO2 films using spectroscopic ellipsometry

(2011) Ming Di et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Growth, microstructure and electrical properties of sputter-deposited hafnium oxide (HfO2) thin films grown using a HfO2 ceramic target

(2010) B. Aguirre et al.   APPLIED SURFACE SCIENCE

Impact of the TiN electrode deposition on the HfO2 band gap for advanced MOSFET gate stacks

(2010) C. Gaumer et al.   MICROELECTRONIC ENGINEERING

Energy-band parameters of atomic layer deposited Al2O3 and HfO2 on InxGa1−xAs

(2009) M. L. Huang et al.   APPLIED PHYSICS LETTERS

Size-dependent polymorphism in HfO2 nanotubes and nanoscale thin films

(2009) Michael Shandalov et al.   JOURNAL OF APPLIED PHYSICS

Determination of electron effective mass and electron affinity in HfO2 using MOS and MOSFET structures

(2009) S. Monaghan et al.   SOLID-STATE ELECTRONICS

Atomic layer deposition of an HfO2 thin film using Hf(O-iPr)4

(2009) Jeong Chan Kim et al.   THIN SOLID FILMS

Comparative structural and electrical analysis of NiO and Ti doped NiO as materials for resistance random access memory

(2008) M. J. Lee et al.   JOURNAL OF APPLIED PHYSICS

Optical properties of thermally annealed hafnium oxide and their correlation with structural change

(2008) Jun-Woo Park et al.   JOURNAL OF APPLIED PHYSICS

Effects of HfO2 buffer layer thickness on the properties of Pt/SrBi2Ta2O9/HfO2/Si structure

(2008) Ching-Chich Leu et al.   JOURNAL OF MATERIALS RESEARCH

Structure and dielectric properties of HfO2 films prepared by a sol–gel route

(2008) M.-G. Blanchin et al.   JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY

Optical characterization of HfO2 by spectroscopic ellipsometry: Dispersion models and direct data inversion

(2008) Jordi Sancho-Parramon et al.   THIN SOLID FILMS