In-situ spectroscopic ellipsometry and structural study of HfO2 thin films deposited by radio frequency magnetron sputtering

Determination of the Analytical Relationship between Refractive Index and Density of SiO2Layers

(2016) W. Rzodkiewicz et al.   ACTA PHYSICA POLONICA A

Reduction of interfacial SiO2 at HfO2/Si interface with Ta2O5 cap

(2013) Kazuyoshi Kobashi et al.   JOURNAL OF APPLIED PHYSICS

Local structural modifications of the HfO2 layer in the Al2O3 capped high-k dielectric films as probed by EXAFS

(2012) M. A. Sahiner et al.   PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

Optical properties of HfO2 thin films deposited by magnetron sputtering: From the visible to the far-infrared

(2012) T.J. Bright et al.   THIN SOLID FILMS

Dielectric property and electrical conduction mechanism of ZrO2–TiO2 composite thin films

(2011) Ming Dong et al.   JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS

Effects of physical growth conditions on the structural and optical properties of sputtered grown thin HfO2 films

(2011) Gulnur Aygun et al.   THIN SOLID FILMS

Spectroscopic ellipsometry study of hydrogenated amorphous silicon carbon alloy films deposited by plasma enhanced chemical vapor deposition

(2010) D. K. Basa et al.   JOURNAL OF APPLIED PHYSICS

Interfacial and structural properties of sputtered HfO2 layers

(2009) G. Aygun et al.   JOURNAL OF APPLIED PHYSICS

Interlevel Dielectric Processes Using PECVD Silicon Nitride, Polyimide, and Polybenzoxazole for GaAs HBT Technology

(2009) Jiro Yota   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Spectroscopic ellipsometry study of thin film thermo-optical properties

(2009) H. Xie et al.   THIN SOLID FILMS

Ellipsometric analysis of mixed metal oxides thin films

(2008) O. Buiu et al.   THIN SOLID FILMS

Electrical and dielectrical properties of tantalum oxide films grown by Nd:YAG laser assisted oxidation

(2008) G. Aygun et al.   THIN SOLID FILMS

Compositional, structural and electronic characteristics of HfO2 and HfSiO dielectrics prepared by radio frequency magnetron sputtering

(2008) Li-ping Feng et al.   VACUUM