Optical characterization of hafnium oxide thin films for heat mirrors

Published 2015 View Full Article

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Title
Optical characterization of hafnium oxide thin films for heat mirrors
Authors
Keywords
Optical properties, Annealing, X-ray diffraction, Atomic force microscopy, Insulator-metal-insulator (IMI) structure
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 32, Issue -, Pages 22-30
Publisher
Elsevier BV
Online
2015-01-22
DOI
10.1016/j.mssp.2014.12.079

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