Optical properties of thermally annealed hafnium oxide and their correlation with structural change

Title
Optical properties of thermally annealed hafnium oxide and their correlation with structural change
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 104, Issue 3, Pages 033521
Publisher
AIP Publishing
Online
2008-08-07
DOI
10.1063/1.2961326

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