Atomic layer deposition of an HfO2 thin film using Hf(O-iPr)4

Published 2009 View Full Article

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Title
Atomic layer deposition of an HfO2 thin film using Hf(O-iPr)4
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 19, Pages 5695-5699
Publisher
Elsevier BV
Online
2009-02-27
DOI
10.1016/j.tsf.2009.02.115

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