Structure and dielectric properties of HfO2 films prepared by a sol–gel route

Published 2008 View Full Article

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Title
Structure and dielectric properties of HfO2 films prepared by a sol–gel route
Authors
Keywords
-
Journal
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY
Volume 47, Issue 2, Pages 165-172
Publisher
Springer Nature
Online
2008-05-12
DOI
10.1007/s10971-008-1758-4

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