Ferroelectricity in undoped-HfO2 thin films induced by deposition temperature control during atomic layer deposition
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Title
Ferroelectricity in undoped-HfO2 thin films induced by deposition temperature control during atomic layer deposition
Authors
Keywords
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Journal
Journal of Materials Chemistry C
Volume 4, Issue 28, Pages 6864-6872
Publisher
Royal Society of Chemistry (RSC)
Online
2016-06-17
DOI
10.1039/c6tc02003h
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