Growth, microstructure and electrical properties of sputter-deposited hafnium oxide (HfO2) thin films grown using a HfO2 ceramic target

Published 2010 View Full Article

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Title
Growth, microstructure and electrical properties of sputter-deposited hafnium oxide (HfO2) thin films grown using a HfO2 ceramic target
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 257, Issue 6, Pages 2197-2202
Publisher
Elsevier BV
Online
2010-09-30
DOI
10.1016/j.apsusc.2010.09.072

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