Piezoelectric MEMS—evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era
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Title
Piezoelectric MEMS—evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 32, Issue 1, Pages 014005
Publisher
IOP Publishing
Online
2021-11-18
DOI
10.1088/1361-6439/ac3ab9
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